This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The ...
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This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
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Add this copy of Design and Manufacturing of Active Microsystems to cart. $94.76, new condition, Sold by Media Smart rated 4.0 out of 5 stars, ships from Hawthorne, CA, UNITED STATES, published 2011 by Springer.
Edition:
2011, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Add this copy of Design and Manufacturing of Active Microsystems to cart. $106.43, new condition, Sold by discount_scientific_books rated 5.0 out of 5 stars, ships from Sterling Heights, MI, UNITED STATES, published 2011 by Springer-Verlag Berlin and Heidelberg GmbH & Co. K.
Edition:
2011, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Add this copy of Design and Manufacturing of Active Microsystems to cart. $110.94, new condition, Sold by discount_scientific_books rated 5.0 out of 5 stars, ships from Sterling Heights, MI, UNITED STATES, published 2011 by Springer-Verlag Berlin and Heidelberg GmbH & Co. K.
Edition:
2011, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Add this copy of Design and Manufacturing of Active Microsystems to cart. $159.69, new condition, Sold by Ingram Customer Returns Center rated 5.0 out of 5 stars, ships from NV, USA, published 2014 by Springer-Verlag Berlin and Heidelberg GmbH & Co. K.
Edition:
2014, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
