The entire technology of printing high resolution and high-density integrated circuits patterns into thin resist process pattern transfer coatings is given a close look here. Includes optical lithography, electron-beam, ion beam and X-ray lithography and coverage of various lithography methods.
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The entire technology of printing high resolution and high-density integrated circuits patterns into thin resist process pattern transfer coatings is given a close look here. Includes optical lithography, electron-beam, ion beam and X-ray lithography and coverage of various lithography methods.
Read Less
Add this copy of Handbook of Vlsi Microlithography [Hardcover] Helbert, to cart. $125.00, like new condition, Sold by Broad Street Books rated 5.0 out of 5 stars, ships from Branchville, NJ, UNITED STATES, published 2002 by William Andrew.
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