This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.
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This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.
Read Less
Add this copy of Introductory Mems: Fabrication and Applications to cart. $68.21, good condition, Sold by Books From California rated 4.0 out of 5 stars, ships from Simi Valley, CA, UNITED STATES, published 2014 by Springer.
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Add this copy of Introductory Mems: Fabrication and Applications to cart. $23.07, new condition, Sold by discount_scientific_books rated 5.0 out of 5 stars, ships from Sterling Heights, MI, UNITED STATES, published 2009 by Springer.
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