Silicon-on-insulator (SOI) technology in microelectronics is proliferating and is ready to be applied in a growing number of IC fabrication situations. Bonding of single crystal Si to dielectrics, normally silicon dioxide, is a key method of producing SOI structures. The book assists engineers in applying emerging SOI technology in practice.
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Silicon-on-insulator (SOI) technology in microelectronics is proliferating and is ready to be applied in a growing number of IC fabrication situations. Bonding of single crystal Si to dielectrics, normally silicon dioxide, is a key method of producing SOI structures. The book assists engineers in applying emerging SOI technology in practice.
Read Less
Add this copy of Silicon Wafer Bonding Technology for Vlsi and Mems to cart. $98.01, good condition, Sold by HPB-Red rated 5.0 out of 5 stars, ships from Dallas, TX, UNITED STATES, published 2002 by Inst of Engineering & Technology.
Publisher:
Institution of Engineering & Technology
Published:
2002
Language:
English
Alibris ID:
18280099623
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