This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS. This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an ...
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This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS. This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields. It provides: * A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques * Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units * Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding * Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.
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Add this copy of Microstereolithography and Other Fabrication Techniques to cart. $59.50, very good condition, Sold by Crossroad Books rated 5.0 out of 5 stars, ships from Eau Claire, WI, UNITED STATES, published 2001 by Wiley.
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Near Fine with no dust jacket. 047152185x. Previous owners ink-stamp on front flyleaf. Else binding and pages are clean.; EAH16B; 0.8 x 9.2 x 6.1 Inches; 260 pages.
Add this copy of Microstereolithography and Other Fabrication Techniques to cart. $140.00, good condition, Sold by HPB-Red rated 5.0 out of 5 stars, ships from Dallas, TX, UNITED STATES, published 2001 by Wiley.
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Add this copy of Microstereolithography and Other Fabrication Techniques to cart. $185.67, like new condition, Sold by GreatBookPrices rated 4.0 out of 5 stars, ships from Columbia, MD, UNITED STATES, published 2001 by Wiley.
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Fine. Sewn binding. Cloth over boards. 274 p. In Stock. 100% Money Back Guarantee. Brand New, Perfect Condition, allow 4-14 business days for standard shipping. To Alaska, Hawaii, U.S. protectorate, P.O. box, and APO/FPO addresses allow 4-28 business days for Standard shipping. No expedited shipping. All orders placed with expedited shipping will be cancelled. Over 3, 000, 000 happy customers.
Add this copy of Microstereolithography and Other Fabrication Techniques to cart. $243.87, new condition, Sold by GreatBookPrices rated 4.0 out of 5 stars, ships from Columbia, MD, UNITED STATES, published 2001 by Wiley.
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New. Sewn binding. Cloth over boards. 274 p. In Stock. 100% Money Back Guarantee. Brand New, Perfect Condition, allow 4-14 business days for standard shipping. To Alaska, Hawaii, U.S. protectorate, P.O. box, and APO/FPO addresses allow 4-28 business days for Standard shipping. No expedited shipping. All orders placed with expedited shipping will be cancelled. Over 3, 000, 000 happy customers.
