Principles of Plasma...
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Alan J Lichtenberg
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Plasma Etching Processes for...
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Plasma Etching Processes for...
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Handbook of Plasma Processing...
Stephen M Rossnagel,
William D Westwood
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Handbook of Advanced Plasma...
R J Shul (Editor),
S J Pearton (Editor)
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Micromachining Using...
Rolf Wuthrich,
Jana D Abou Ziki
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Niederdruckplasmen Und...
Dr. Gerhard Franz
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Plasma Deposition, Treatment,...
Riccardo D'Agostino (Editor),
Daniel L Flamm (Editor)
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Dry Etching for...
Ronald A Powell
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