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Introduction to Microfluidics
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Microsystem Design
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Mems Packaging
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Mems and Microsystems: Design...
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RF Mems and Their Applications
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An Introduction to...
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Dr. Sami Franssila
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Mechanics of...
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Microfluidic Technologies for...
Steffen Hardt (Editor),
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A Guide to Hands-On Mems...
Joel A Kubby
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Jean Berthier
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From Mems to Bio-Mems and Bio...
Marc J Madou
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Travels to the Nanoworld
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Handbook of Silicon Based...
Markku Tilli (Editor),
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MEMS and Microsystems: Design...
Tai-Ran Hsu
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(KOVACS
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